Method of transverse optical coherence tomography

摘要

The method involves scanning the measurement object with a measurement beam which is brought into interference with a reference beam in an interferometer arrangement. The scanning beam path runs telecentrically on the side of the object being scanned and flat tomographic imaging is achieved without additional frequency modulation of the interferometer output signal associated with the scanning. A scanning mirror (7',7") is placed at the focal point (10) of optics (8) which focus the measurement beam (6) on the object.