| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the amount of data sent from a data transmitting part to a control part and to shorten transmission time between the two by structuring the control part so that it receives positional information from the data transmission and calculates the position coordinate of a machining point. SOLUTION: A laser beam 3 is emitted from a machining laser beam source 2, with the quantity of beam adjusted by a beam quantity varying part 4. With the diaphragm adjusted by an aperture 5, the most of the laser beam emitted to a dichroic mirror 6 is made incident on an objective lens 7 and converged on the machining point of a work 10 on a stage 9. The energy of the most of the laser beam emitted to the dichroic mirror 6 is measured by a beam quantity monitor 8 on the aperture side, with the measured result supplied to the control part 16. In the control part 16, at least either the laser beam or the stage is moved, with their relative positional relation controlled. In the data transmitting part 15, positional information is transmitted to the control part 16. The control part 16, receiving the positional information from the data transmitting part 15, calculates the position coordinate of the machining point.</p> |
