| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily dilute and prepare a developer containing an alkali and a surfactant in an exact concentration by quantitatively supplying individually at least an alkali aq. solution, a surfactant aq. solution and water, mixing and preparing the same. SOLUTION: In a raw material part, a prescribed quantity of the original solution (alkali aq. solution) from an original solution tank 1 through a pipe line 2 by using a quantitative pump 5 and a prescribed quantity of the original solution (surfactant aq. solution) from an original solution tank 3 through a pipe line 4 by using a quantitative pump 6 are respectively supplied. Further a prescribed quantity of a pure water is supplied from a pure water supplying pipe 7 through a pipe line 9 by using a quantitative pump 8. These original solutions are mixed and prepared in a preparation tank 10 as a mixing part. The mixed solution is supplied to a pressure tank 16 by using a pressure pump 11. And the mixed solution is supplied to a substrate 15 through a pipe line 13 and a nozzle 14 by pressurizing with a gas introduced through a gas introducing pipe 12.</p> |
