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发明名称
INSPECTING METHOD OF PARTICLE COUNTER AND CALIBRATION REFERENCE WAFER USED FOR THE METHOD
摘要
申请公布号
JPH1114534(A)
申请公布日期
1999.01.22
申请号
JP19970163638
申请日期
1997.06.20
申请人
MATSUSHITA ELECTRON CORP
发明人
HAGIWARA KENJI
分类号
G01B11/30;G01N1/00;G01N15/14;G01N21/88;G01N21/93;G01N21/94;G01N21/956;H01L21/02;H01L21/66;(IPC1-7):G01N15/14
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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