| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror precision driving device which can stabilize even a position holding condition without adjusting an electric current and a temperature when driving torque is set large and it is positioned once. SOLUTION: A mirror holder 2 is held on a single base board 1b among three base boards 1a, 1b, 1c mutually arranged at a right angle through two pins 5 and 7 mutually arranged in the right-angled direction and a pin holder 4 to hold these pins. Ultrasonic motors 10 and 12 are installed on the other base boards 1a and 1c, and a shaft to be contacted with a side surface of the mirror holder 2 through a ball 15 is threadedly engaged with shafts of these ultrasonic motors. A spring 9 is arranged between the mirror holder 2 and the base board 1b. A position of the mirror holder 2 is detected by a position detecting sensor installed on the base board 1b. |
