首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Method and apparatus for inspecting high-precision patterns
摘要
申请公布号
EP0838679(A3)
申请公布日期
1999.01.20
申请号
EP19970250312
申请日期
1997.10.22
申请人
NEC CORPORATION
发明人
MURAKAMI, SHINGO;YAMANE, TSUYOSHI;OGURA, YUKIO;NAKATANI, KATSUHIKO;AIDA, YOSHIAKI
分类号
G01N21/95;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01N21/95
代理机构
代理人
主权项
地址
您可能感兴趣的专利
TOUCH DISPLAY APPARATUS OF VEHICLE AND DRIVING METHOD THEREOF
TOUCH SENSOR CONTACT INFORMATION
REMOTE CONTROLLER WITH TOUCH PANEL
COMMAND OF A DEVICE BY GESTURE EMULATION OF TOUCH GESTURES
Waveguide Radiator, Array Antenna Radiator and Synthetic Aperture Radar System
WEARABLE RADAR REFLECTORS
Downhole Surveying
ARTICULATING INSTRUMENT CLUSTER
WOUND IRON CORE FOR STATIC APPARATUS, AMORPHOUS TRANSFORMER AND COIL WINDING FRAME FOR TRANSFORMER
MAGNETIC SPRING DEVICE
HIGH FREQUENCY COMPONENT AND FILTER COMPONENT
ELASTIC WAVE FILTER DEVICE AND MANUFACTURING METHOD OF THE SAME
Scalable Periphery for Digital Power Control
SYSTEMS AND METHODS MITIGATING TEMPERATURE DEPENDENCE OF CIRCUITRY IN ELECTRONIC DEVICES
SYSTEM AND METHOD FOR LOOSE NUT DETECTION
IMPEDANCE MEASUREMENT APPARATUS
METHOD FOR EVALUATION OF CABLE AGING DEGRADATION BASED ON SLICE SAMPLING
MAGNETIC FIELD PROBE SEALED WITH A METALLIC PLUG
STATOR STRUCTURE OF VR TYPE RESOLVER AND VR TYPE RESOLVER
ARRANGEMENT FOR MEASURING A CURRENT WITH A CURRENT TRANSDUCER OF THE ROGOWSKI TYPE
