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发明名称
摘要
申请公布号
JP2847743(B2)
申请公布日期
1999.01.20
申请号
JP19890105314
申请日期
1989.04.24
申请人
NIPPON DENKI KK
发明人
KAWANAKA MASAFUMI
分类号
H01L29/73;H01L21/331;H01L29/161;H01L29/165;H01L29/267;H01L29/737;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
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