Polishing apparatus and polishing method using the same

摘要

A polishing apparatus and a polishing method using the apparatus in which an elastic portion is interposed between a polishing table and a polishing cloth, whereby the contacting state between the face of the polishing cloth and a face of a sample to be polished is made uniform and the flatness of the sample is improved. A polishing apparatus and a polishing method using the apparatus in which a second elastic body having on a sample-contacting face resin pellets and/or polishing particles is used in a polishing cloth, whereby the degree of the polishing on a face of a sample to be polished is uniformalized in a macroscopic view point and the flatness is improved in a microscopic view point. A polishing apparatus and a polishing method using the apparatus in which a second elastic body having convex portions, concave portions or groove portions formed on a sample-contacting face is used in a polishing cloth, whereby the degree of the polishing on a face of a sample to be polished is uniformalized in a macroscopic view point and the flatness is improved in a microscopic view point. A polishing apparatus and a polishing method using the apparatus in which an elastic portion is interposed between a polishing table and a polishing cloth, and the second elastic body is used in the polishing cloth.