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发明名称
PHOTOMASK
摘要
申请公布号
KR0161595(B1)
申请公布日期
1999.01.15
申请号
KR19950045700
申请日期
1995.11.30
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, DONG-SUN;YEO, KI-SUNG;YU, YONG-HUN
分类号
G03F1/26;G03F1/38;(IPC1-7):G03F1/00;G03F1/08;H01L21/027
主分类号
G03F1/26
代理机构
代理人
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地址
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