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发明名称
Kristalline Gegenstände und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE3856275(D1)
申请公布日期
1999.01.14
申请号
DE19883856275
申请日期
1988.03.25
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
OSADA, YOSHIYUKI, ATSUGI-SHI KANAGAWA-KEN, JP
分类号
C30B25/00;C30B25/02;C30B25/10;C30B25/18;H01L21/20;H01L21/205;(IPC1-7):H01L21/20;C30B19/12;H01L21/36
主分类号
C30B25/00
代理机构
代理人
主权项
地址
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