首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Anisotropes fluorbasiertes Plasmaätzverfahren für Silizium
摘要
申请公布号
DE19706682(C2)
申请公布日期
1999.01.14
申请号
DE19971006682
申请日期
1997.02.20
申请人
ROBERT BOSCH GMBH, 70469 STUTTGART, DE
发明人
LAERMER, FRANZ, DR., 70437 STUTTGART, DE;SCHILP, ANDREA, 73525 SCHWAEBISCH GMUEND, DE
分类号
H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;C23C14/06;C23C16/30;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
您可能感兴趣的专利
INTERMEDIATE DOGGING DEVICE FOR END DOGGING LOG CARRIAGE
COMBUSTIBLE GAS DETECTING ELEMENT
FUEL SYSTEM FOR AN INTERNAL COMBUSTION ENGINE
SELF SEALING HEAT INSULATING SHUTTER SYSTEM
METHOD OF POSITIONING A FRAME IN A PAVED SURFACE
COVER SHEET CONTAINING AN ALKALI PERMEABLE HYDROPHILIC LAYER BETWEEN A BARRIER TIMING LAYER AND AN INTEGRAL IMAGING RECEIVER ELEMENT
RETORQUE MEASURING APPARATUS
CENTERING FOR CASTING CONCRETE ROOFS
HARDFACING COMPOSITION OF NICKEL-BONDED SINTERED CHROMIUM CARBIDE PARTICLES AND TOOLS HARDFACED THEREOF
USE OF ARGON TO PREPARE LOW-CARBON, LOW-NITROGEN STEELS IN THE BASIC OXYGEN PROCESS
EARTH MOVING MACHINE OF THE SCRAPING BLADE TYPE
APPARATUS AND METHOD FOR TREATING THE INTERNAL SURFACES OF THE WALLS OF A TANK
PTC COMPOSITIONS
PROCESS FOR THE PREPARATION OF A GEL RESISTANT GLYCOL COMPOSITION
APPARATUS FOR CLEANING JET ENGINE NOZZLES
HEART VALVE PROSTHESIS
ROTARY GRASS MOWING MACHINES
LIQUEFACTION OF COAL
CAPACITOR RUN MOTOR
CICLOBUTANONOXIMOCARBAMATOS, PROCESSO PARA SUA PREPARACAO, COMPOSICOES PRAGUICIDAS E EMPREGO
