发明名称 |
Method and device for controlling the electrical current density over a workpiece during heat treatment by plasma |
摘要 |
Regulating electric current density over a workpiece in a plasma heat treatment, using an auxiliary electrode (9) of known surface area involves: (i) generating a neutral plasma in furnace (1); (ii) measuring the total furnace current Ig, and auxiliary electrode current Ihe; and (iii) using the values obtd. with the known auxiliary electrode surface area Fhe to compute the unknown charge surface area Fch. The auxiliary electrode (9) is then switched out, the neutral gas plasma replaced by a material-transferring plasma, and total furnace current Ig is set in accordance with the required current density. Also claimed is appts. for performing the above process. |
申请公布号 |
EP0749147(A3) |
申请公布日期 |
1999.01.13 |
申请号 |
EP19960106049 |
申请日期 |
1996.04.18 |
申请人 |
IPSEN INDUSTRIES INTERNATIONAL GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG |
发明人 |
DRISSEN, HANSJAKOB;GRAEFEN, WINFRIED;EDENHOFER, BERND, DR. |
分类号 |
H05H1/46;C21D1/09;C21D1/38;C23C8/36;C23C14/54;H01J37/32;H05H1/36 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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