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发明名称
Device for stripping photoresist from the surface of a semi-conductor water
摘要
申请公布号
EP0561300(B1)
申请公布日期
1999.01.13
申请号
EP19930104068
申请日期
1993.03.12
申请人
TEXAS INSTRUMENTS DEUTSCHLAND GMBH
发明人
ENDL, HELMUT;RINCK, HELMUT
分类号
G03F7/42;H01L21/00;H01L21/02;H01L21/311;H01L21/3213;(IPC1-7):H01L21/00
主分类号
G03F7/42
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