发明名称 Multi-layer wiring structure having narrowed portions at predetermined length intervals
摘要 A semiconductor device having a laminated wiring layer composed of an Al or Al alloy layer and a high melting point conductive layer, wherein the laminated wiring layer has narrowed portions at which the stress tolerance of the Al or Al alloy is reduced. The controlled breakage of the Al or Al alloy layer at the narrowed portion results in a laminated wiring layer of a predetermined resistance component.
申请公布号 US5859476(A) 申请公布日期 1999.01.12
申请号 US19930113665 申请日期 1993.08.31
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 ONODA, HIROSHI
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/528;H01L23/532;(IPC1-7):H01L29/06 主分类号 H01L21/28
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