| 摘要 |
<p>PROBLEM TO BE SOLVED: To put intake/out a wafer without the use of a special device regarding the structure of a wafer carrier. SOLUTION: A first open part 2, a second open part 3, a drawing handle 4 and a drawing hole 5 are provided to a wafer case 1. The wafer case 1 is stored along a slot formed on the inner side of a wafer carrier 6. For putting out the wafer case 1 from the wafer carrier 6, a method for directly drawing out the wafer case manually, a method for drawing it out by picking the drawing handle 4, and a method for drawing it out by catching any projection on the drawing hole 5 are provided. Thus, the wafer can safely be out in/taken out, since it can be handled even by hand.</p> |
