| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of manufacturing an MIM-type nonlinear element having a high nonlinearity which exhibits abruptness in the voltage-current characteristics, the MIM-type nonlinear element and high image quality liq. crystal display panel using it. SOLUTION: A manufacturing method comprises forming steps (a) a first conductive film on a substrate, pref. at a substrate temp. of 150-300 deg.C, anodic oxidation of this film for forming an insulation film on the surface of the conductive film, (b) using a forming liq. contg. water 1-10 wt. with ethylene glycol solvent, (c) forming a second conductive film on the insulation film at a substrate temp. of 200 deg.C or less, and pref. 150-300 deg.C for step (a).</p> |
