发明名称 |
Controlled multi-nozzle liquid dispensing system |
摘要 |
A flow system that is suitable for controlled dispensing of liquids such as anti-reflection coatings is described. The system is driven by a gas at high pressure from a single dispensing bottle. On emerging from the dispensing bottle the fluid is directed into one of two branches, each such branch being terminated by its own nozzle. By inserting a needle valve in each branch of the flow system, between the branch point and the nozzle, control of the amount of liquid dispensed by each nozzle is separately achieved and a change in flow through one nozzle does not affect the flow through the other nozzle.
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申请公布号 |
US5857590(A) |
申请公布日期 |
1999.01.12 |
申请号 |
US19970826717 |
申请日期 |
1997.04.07 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
KAO, YAO-HWAN;HSIEH, CHI-REN |
分类号 |
B05B9/03;B05B12/04;G01F11/28;(IPC1-7):G01F11/00 |
主分类号 |
B05B9/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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