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发明名称
HANDOTAISHUSEKIKAIROSOCHI OYOBI SONOSEIZOHOHO
摘要
申请公布号
JPS5197389(A)
申请公布日期
1976.08.26
申请号
JP19750023185
申请日期
1975.02.24
申请人
发明人
分类号
H01L21/76;H01L27/04
主分类号
H01L21/76
代理机构
代理人
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地址
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