发明名称 TOROIDAL LOW-FIELD REACTIVE GAS SOURCE
摘要 An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer havinga magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
申请公布号 WO9900823(A1) 申请公布日期 1999.01.07
申请号 WO1998US13155 申请日期 1998.06.23
申请人 APPLIED SCIENCE AND TECHNOLOGY, INC. 发明人 SMITH, DONALD, K.;CHEN, XING;HOLBER, WILLIAM, M.;GEORGEUS, ERIC
分类号 H05H1/46;H01J27/16;H01J37/32;H01L21/205;H01L21/302;H01L21/3065 主分类号 H05H1/46
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