An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer havinga magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
申请公布号
WO9900823(A1)
申请公布日期
1999.01.07
申请号
WO1998US13155
申请日期
1998.06.23
申请人
APPLIED SCIENCE AND TECHNOLOGY, INC.
发明人
SMITH, DONALD, K.;CHEN, XING;HOLBER, WILLIAM, M.;GEORGEUS, ERIC