| 摘要 |
<p>A method and system for detecting material bound on a surface of a piezoelectric resonator (20) introduces a signal of a constant frequency through the sensing resonator and detects a change in the insertion phase shift of the resonator (20) as a result of the binding of the material being detected on the surface of the resonator (20). Environmental effects on the measurement are effectively canceled by the use of a reference resonator driven by the same input signal (21). A multiple-port sensing device is provided which includes thin-film sensing and reference resonators monolithically formed on a substrate.</p> |
