| 摘要 |
Thin film AMA (actuated mirror array) and method for manufacturing the thin film AMA are disclosed. The thin film AMA has an active matrix, a supporting member (175), actuating parts (210, 211), a reflecting member (260), and a flatness enhancing member (290). The flatness enhancing member (290) such as the stress balancing layer or the stiffening member is formed beneath the reflecting member (260) in order to enhance the flatness of the reflecting member (260) without a bending of the reflecting member (260). Therefore, the reflecting member (260) can have the level surface by the flatness enhancing member though the deformation stress such as residual stress is generated in the reflecting member (260) during forming the reflecting member, so the light efficiency is enhanced and the quality of the picture projected onto the screen is increased. |
