| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam deflection device in which a charged particle beam of a wide momentum can be deflected at a deflection angle according to a plan value, operation efficiency is improved and which can be made an inexpensive excitation power source. SOLUTION: In the beam deflection device having first and second deflection electric magnets 1a, 1b oppositely disposed and deflecting a charged particle beam and a vacuum transportation means disposed between the deflection electric magnets 1a, 1b and transporting the charged particle beam, the deflection electric magnets 1a, 1b have the same deflection angleαrespectively, an angle making between a beam emission direction and a magnetic pole end normal direction at the magnetic pole end of the emission side of the first deflection electric magnet 1a and another angle making between a beam incidence direction and a magnetic pole end normal direction at the magnetic pole end of the incidence side of the second deflection electric magnet 1b have the same angleθ, and relation of the deflection angleαand the angleθis established inθ=(180-α).
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