发明名称 |
A METHOD OF COATING EDGES WITH DIAMOND-LIKE CARBON |
摘要 |
A method of creating a diamond-like carbon film on a substrate (22), including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5 x 10<10> per cm<3> and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment. Also, an article of manufacture which includes a substrate having a surface and a diamond-like carbon film on the surface, wherein the film has a hardness greater than approximately 20 Gpa and no discernable grains 300 ANGSTROM or greater in diameter when viewed at a magnification of 50,000X in a field-emission scanning electron microscope. |
申请公布号 |
WO9858097(A1) |
申请公布日期 |
1998.12.23 |
申请号 |
WO1998US12270 |
申请日期 |
1998.06.11 |
申请人 |
NORTHEASTERN UNIVERSITY |
发明人 |
HOPWOOD, JEFFREY, A.;PAPPAS, DAVID, L. |
分类号 |
B43K1/00;B26B21/60;C23C16/26;C23C16/27;(IPC1-7):C23C16/26 |
主分类号 |
B43K1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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