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发明名称
METHOD FOR PRODUCING NEAR NET SHAPE PLANAR SPUTTERING TARGETS AND AN INTERMEDIATE THEREFOR
摘要
申请公布号
EP0885079(A1)
申请公布日期
1998.12.23
申请号
EP19970906532
申请日期
1997.02.13
申请人
TOSOH SMD, INC.
发明人
STELLRECHT, DAVID, E.
分类号
B22F7/08;C23C14/34;(IPC1-7):B22F3/14;B22F3/24;B22F5/00
主分类号
B22F7/08
代理机构
代理人
主权项
地址
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