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发明名称
Constant temperature chamber in a handler for semiconductor device testing apparatus
摘要
申请公布号
SG55228(A1)
申请公布日期
1998.12.21
申请号
SG19960010553
申请日期
1996.09.02
申请人
ADVANTEST CORPORATION.
发明人
FUKUMOTO KEIICHI
分类号
G01R31/02;G01R31/303;H01J37/20;(IPC1-7):G01R31/02
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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