发明名称 PICK-UP DEVICE OF PELLET
摘要 <p>PROBLEM TO BE SOLVED: To protect a circuit formed on the rear of a pellet against damage so as to improve products in yield, by a method wherein the pellets are pasted on a sheet with ultraviolet-curing adhesive agent, the ultraviolet-curing adhesive agent is cured by ultraviolet rays emitted from an ultraviolet ray generator, and then the pellets are separated from the sheet with a push head. SOLUTION: A large number of pellets 1 are pasted on a sheet 4 with ultraviolet-curing adhesive agent, and the sheet 4 is expanded and held on a mounter ring 2 to separate the pellets 1 from each other. When a push head 15 is made to ascend to a position at which it pushes up the sheet 4 a little, the outer cylinder of the push head 15 is evacuated to suck the sheet 4. At the same time, the sheet 4 is irradiated with ultraviolet rays emitted from the tip of an optical fiber 16 through an ultraviolet ray generator 17, the ultraviolet-curing adhesive agent applied to the irradiated part of the sheet 4 gets cured to lessen the pellets 1 in adhesion. The pellet 1 is attracted to a mount head 11, and then the pellet 1 is separated from the sheet 4.</p>
申请公布号 JPH10335270(A) 申请公布日期 1998.12.18
申请号 JP19970143664 申请日期 1997.06.02
申请人 NEC CORP 发明人 MAEDA TAKEHIKO
分类号 H01L21/67;H01L21/301;H01L21/68;(IPC1-7):H01L21/301 主分类号 H01L21/67
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