摘要 |
<p>PROBLEM TO BE SOLVED: To protect a circuit formed on the rear of a pellet against damage so as to improve products in yield, by a method wherein the pellets are pasted on a sheet with ultraviolet-curing adhesive agent, the ultraviolet-curing adhesive agent is cured by ultraviolet rays emitted from an ultraviolet ray generator, and then the pellets are separated from the sheet with a push head. SOLUTION: A large number of pellets 1 are pasted on a sheet 4 with ultraviolet-curing adhesive agent, and the sheet 4 is expanded and held on a mounter ring 2 to separate the pellets 1 from each other. When a push head 15 is made to ascend to a position at which it pushes up the sheet 4 a little, the outer cylinder of the push head 15 is evacuated to suck the sheet 4. At the same time, the sheet 4 is irradiated with ultraviolet rays emitted from the tip of an optical fiber 16 through an ultraviolet ray generator 17, the ultraviolet-curing adhesive agent applied to the irradiated part of the sheet 4 gets cured to lessen the pellets 1 in adhesion. The pellet 1 is attracted to a mount head 11, and then the pellet 1 is separated from the sheet 4.</p> |