PROJECTION ALIGNER AND MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19970144352-传众专利搜索

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发明名称	PROJECTION ALIGNER AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH10335225(A)	申请公布日期	1998.12.18
申请号	JP19970144352	申请日期	1997.06.02
申请人	SHARP CORP	发明人	OKA NOBUHIKO
分类号	G03F9/00;G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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