MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19970139994-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH10335455(A)	申请公布日期	1998.12.18
申请号	JP19970139994	申请日期	1997.05.29
申请人	NEC CORP	发明人	TSUKAMOTO SHIGEHIKO
分类号	H01L23/52;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/320	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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