| 摘要 |
PROBLEM TO BE SOLVED: To correct the waving of a surface, by fixing a light shielding mask having holes that have a prescribed diameter on the surface of a flexible film, irradiating a plurality of holes on the light shielding mask with laser beams, and making holes having a prescribed depth that penetrates at least the surface of the flexible film. SOLUTION: A light shielding mask 9 having many small holes is tightly clamped on the upper plane of a substrate by using a placing and fixing tool 10, so as to cover the entire plane to be processed. As the surface layer of the substrate is made of polyimide film, laser beams are applied on the surface of the polyimide film layer from a laser beam head 11 through the holes provided on the light shielding mask 9. Since the surface of the polyimide film layer is pressed by the light shielding mask 9 during processing, the flexible polyimide film layer is brought into close contact with the light shielding mask 9 and the waving of the surface is corrected. |
