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发明名称
METHOD AND DEVICE FOR VAPOR DEPOSITION
摘要
申请公布号
JPH10330920(A)
申请公布日期
1998.12.15
申请号
JP19970148338
申请日期
1997.06.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OKAZAKI YOSHIYUKI;KUNIEDA TOSHIAKI;KAMIYAMA TOSHIBUMI
分类号
C23C14/12;C23C14/24;(IPC1-7):C23C14/24
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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