发明名称 CHEMICAL ETCHANT FOR PALLADIUM
摘要 A cyanide based aqueous solution for stripping palladium from copper-containing substrate. The solution includes a cyanide radical source comp ound, Na2CO3, a nitrobenzoic acid, NaOH, thallium compound, an organo mercapto compound, and water. The presence of the organo mercapto compound in thallium containing cyanide bath permits efficient stripping of palladium from copper containing substrates with minimum corrosion damage to the substrate.
申请公布号 CA2133134(C) 申请公布日期 1998.12.15
申请号 CA19942133134 申请日期 1994.09.28
申请人 AMERICAN TELEPHONE AND TELEGRAPH COMPANY 发明人 ABYS, JOSEPH ANTHONY;MAISANO, JOSEPH JOHN, JR.;STRASCHIL, HEINRICH KARL
分类号 C23F1/00;C23F1/44;(IPC1-7):C23F1/40;H01L21/306;H01L21/77 主分类号 C23F1/00
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