发明名称 |
CHEMICAL ETCHANT FOR PALLADIUM |
摘要 |
A cyanide based aqueous solution for stripping palladium from copper-containing substrate. The solution includes a cyanide radical source comp ound, Na2CO3, a nitrobenzoic acid, NaOH, thallium compound, an organo mercapto compound, and water. The presence of the organo mercapto compound in thallium containing cyanide bath permits efficient stripping of palladium from copper containing substrates with minimum corrosion damage to the substrate.
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申请公布号 |
CA2133134(C) |
申请公布日期 |
1998.12.15 |
申请号 |
CA19942133134 |
申请日期 |
1994.09.28 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
ABYS, JOSEPH ANTHONY;MAISANO, JOSEPH JOHN, JR.;STRASCHIL, HEINRICH KARL |
分类号 |
C23F1/00;C23F1/44;(IPC1-7):C23F1/40;H01L21/306;H01L21/77 |
主分类号 |
C23F1/00 |
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