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摘要
申请公布号
DE1160550(C2)
申请公布日期
1964.07.16
申请号
DE1960ST17146
申请日期
1960.11.23
申请人
发明人
分类号
C30B13/10;C30B19/00;H01L21/00;H01L21/20;H01L27/102;H01L29/00;H01L29/88
主分类号
C30B13/10
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