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发明名称
摘要
申请公布号	JP2836787(B2)	申请公布日期	1998.12.14
申请号	JP19900210476	申请日期	1990.08.10
申请人	USHIO DENKI KK	发明人	KATO HARUO
分类号	G03F7/20;G03B27/32;H05K3/00;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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