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发明名称
摘要
申请公布号
JP2836613(B2)
申请公布日期
1998.12.14
申请号
JP19960319755
申请日期
1996.11.29
申请人
NIPPON DENKI KK
发明人
SAKAMOTO TOSHIMORI;KAWAURA HISAO
分类号
H01L21/8247;B82B1/00;H01L27/10;H01L29/66;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
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