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发明名称
METHOD FOR REMOVING RESIDUE FROM WAFER
摘要
申请公布号
JPH10321589(A)
申请公布日期
1998.12.04
申请号
JP19980129745
申请日期
1998.04.24
申请人
MOTOROLA INC
发明人
WILLIAM DAVID DARLINGTON;FRED CAMPIAN
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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