摘要 |
PROBLEM TO BE SOLVED: To provide a detection circuit for small, high sensitivity angular speed sensor in which excellent temperature characteristics are sustained regardless of the temperature characteristics of device output or parasitic capacity. SOLUTION: The detection circuit for angular speed sensor comprises a common switched capacitor circuit 3 connected with a pair of oscillators and applying arbitrary AC voltages or pulse voltages independently to an exciting circuit 1 and a detection drive circuit 2, a sample hold circuit 4 for holding the output signal from the switched capacitor circuit 3 at more than one different sampling timing and outputting as sample signals, and a compensation capacitor Cd3 having electric capacitance substantially equal to the sum of electric capacitance of exciting capacitors Cd1 , Cd2 in the exciting circuit 1 and applying AC voltages or pulse voltages from the detection drive circuit 2 to the exciting capacitors Cd1 , Cd2 while shifting the phase by 180 deg. from that of the exciting capacitors Cd1 , Cd2 . |