| 摘要 |
PROBLEM TO BE SOLVED: To facilitate smoothly opening the lid body of a substrate cassette, when the inside of a closed type substrate cassette wherein a substrate accommodating space has an atmospheric pressure is opened in a carrying-in chamber in a positive pressure atmosphere, by turning the inside of the carrying-in chamber into a positive pressure atmosphere of inert gas, by reopening supply of the inert gas. SOLUTION: The inside of a cassette 3 is maintained in the state of an atmospheric pressure or nearly equal to the state. when a cassette 3 is set on a cassette mounting part 4, a signal A1 is outputted to a controller C. On the basis of the signal A1, a shutting command signal B1 is outputted to an on-off valve V1, and supply of nitrogen gas to a loading area S2 is stopped. A door 60 and a lid body 32 are opened to a lid body open-shut part 6. When the supply of nitrogen gas is stopped, the pressure in the loading area S2 decreases down to about atmospheric pressure. In the lid body open-shut part 6, the lid body 32 is removed, and a signal A2 is outputted to the controller C. As a result, an opening command signal B3 is outputted to the on-off valve V1, and the supply of nitrogen gas to the loading area S2 is again performed. |
