MONITORING SYSTEM OF STATE OF MEASURING DEVICE IN CLEAN ROOM AND MONITORING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To enable the on-line and real-time monitoring of the operating states of measuring devices by transferring signals on the state of measurement from the measuring devices such as particle counters in clean rooms, where the manufacturing processes of semiconductor devices are carried out, to a host computer via a local-area network(LAN). SOLUTION: In this system, the measured results of measuring devices such as particle counters 16 and 18 installed in clean rooms and information on the state of pumping or the state such as the intensity of light for the execution of the accurate measurement of the measuring devices are transferred online to a remotely located host computer 20, and then software for self-analysis functions installed in the host computer 20 is used. By this, the states of the measuring devices are accurately checked.