发明名称 SOLAR BATTERY AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To improve flatness of a solar battery constituted by providing a non-single crystal silicon film on a flexible board by reducing warping and deformation of the solar battery, during and after a solar battery manufacturing process. SOLUTION: In a solar battery having a photoelectric conversion layer 14 provided on a flexible board 11 and formed by stacking non-single crystal silicon thin films, the coefficient of linear thermal expansion of the flexible board 11 is 2.0 to 10.0 ppm. Thus, the coefficients of linear thermal expansion of the flexible board 11 and the photoelectric conversion layer 14 become proximate, and warping and deformation of the solar battery during and after a manufacturing process can be reduced. In addition, since the stress acting on the photoelectric conversion layer 14 is reduced, the photoelectric conversion efficiency can be improved.
申请公布号 JPH10321883(A) 申请公布日期 1998.12.04
申请号 JP19970143078 申请日期 1997.05.16
申请人 SEMICONDUCTOR ENERGY LAB CO LTD;TDK CORP 发明人 MOROOKA HISAO;MIURA TAKAMITSU;YAMADA HIROSHI;KURIHARA KATSUKI;MATSUSE MITSUTAKA;ARAI YASUYUKI
分类号 H01L31/04;H01L27/142;H01L31/0392;H01L31/20 主分类号 H01L31/04
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