| 摘要 |
<p>A fill-in generation device for executing preconditioning by incomplete LU-factorization to generate a fill-in in order to conduct matrix solver for solving multi-dimensional simultaneous linear equations in semiconductor device manufacturing process simulations, including a parameter setting unit (101) for setting necessary parameters so as to reflect physical phenomena of equations to be solved, a fill-in level calculation unit (106) for calculating a level of a fill-in whose generation is possible by using other fill-in levels adopted before the processing, a fill-in level check unit (107) for controlling a fill-in generation position based on a result of comparison between a calculated value of a fill-in level and a threshold value, and a fill-in element calculation unit (108). <IMAGE></p> |
