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发明名称
HEATING APPARATUS OF SEMICONDUCTOR PROCESS MACHINE
摘要
申请公布号
KR0156644(B1)
申请公布日期
1998.12.01
申请号
KR19950043118
申请日期
1995.11.23
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
LEE, DUK-HEE
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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