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发明名称
Absolutes Positionsmeßsystem
摘要
申请公布号
DE29816769(U1)
申请公布日期
1998.11.26
申请号
DE19982016769U
申请日期
1998.09.18
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
分类号
G01B7/00;G01D5/04;H01L21/68;(IPC1-7):G01B5/02
主分类号
G01B7/00
代理机构
代理人
主权项
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