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发明名称
VERFAHREN ZUR HERSTELLUNG EINER DREIDIMENSIONALEN SCHALTUNGSANORDNUNG
摘要
申请公布号
DE59504005(D1)
申请公布日期
1998.11.26
申请号
DE19955004005
申请日期
1995.08.01
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
HUEBNER, HOLGER, D-85598 BALDHAM, DE
分类号
H01L21/68;H01L21/78;H01L21/98;H01L25/065;(IPC1-7):H01L25/065
主分类号
H01L21/68
代理机构
代理人
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