| 摘要 |
<p>PROBLEM TO BE SOLVED: To create an optimal solution by shortening the sequence for measuring the coordinate of an alignment mark using a searching method for determining a good or an optimal solution of motion sequence having a shortest total required time of measurement sequence from moving measurement sequences. SOLUTION: A main control system 6 delivers a command to a loader for mounting a wafer W to be exposed on a wafer holder 9. In this regard, an XY stage 10 is shifted to a mounting position where the wafer W is received. After the wafer W is mounted on the wafer holder 9 and vacuum sucked thereto, the main control system 6 shifts the XY stage 10 such that the measuring point of an alignment optical system 15 is set at an initial point ST for the purpose of EGA. Substantially simultaneously with delivery of the command for loading the water W, the main control system 6 operates a sequence for measuring inputted chip region and alignment mark AM in a shortest time through use of a searching method (linear programming, hereditary algorithm, etc.).</p> |
