发明名称 Method of growing films by flame synthesis using a stagnation-flow reactor
摘要 A method of stabilizing a strained flame in a stagnation flow reactor. By causing a highly strained flame to be divided into a large number of equal size segments it is possible to stablize a highly strained flame that is on the verge of extinction, thereby providing for higher film growth rates. The flame stabilizer is an annular ring mounted coaxially and coplanar with the substrate upon which the film is growing and having a number of vertical pillars mounted on the top surface, thereby increasing the number of azimuthal nodes into which the flame is divided and preserving an axisymmetric structure necessary for stability.
申请公布号 US5840373(A) 申请公布日期 1998.11.24
申请号 US19960699817 申请日期 1996.08.19
申请人 SANDIA CORPORATION 发明人 HAHN, DAVID W.;EDWARDS, CHRISTOPHER F.
分类号 C23C16/27;C23C16/453;(IPC1-7):B05D1/08 主分类号 C23C16/27
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