| 摘要 |
A multiaxis distance measuring device is provided that includes a multiaxis interferometer 14 includes a rectangular box-shaped housing 30, a mounting base 32 disposed within the housing 30, a stage 38 set in a parallelly movable manner via slider 36, and an interferometer body 42 set on the stage 38 via mounting block 40. Interferometer body 42 is partitioned into parts A, B, C, and D, which have as an optical part in common, a polarization beam splitter 68, which is disposed along the longitudinal direction of stage 38 with its lower side facing a laser entrance hole 62 and its upper side face facing a laser exit hole 64. Part A is provided with only a +E,fra 1/4+EE wave plate 70. Part B is provided with a pentagonal prism 72 and a +E,fra 1/4+EE wave plate 70 so that its light emission direction is pointed downwards. Part C is provided with a pentagonal prism 72 and a +E,fra 1/4+EE wave plate 70 so that its light emission direction is pointed upwards, while part D is provided with a pentagonal prism 72 and a +E,fra 1/4+EE wave plate 70 so that its light emission direction is pointed to the side. The device advantageously requires only a single alignment between the optical axis of the multiaxis interferometer 14 and the reflecting target and can measure distances in at least two orthogonal directions.
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