| 摘要 |
PROBLEM TO BE SOLVED: To make feasible of a plurality of continuous processings in excellent maintainability avoiding the mutual pollution in respective processing chambers by communicating the specimens in carrying in and out possible mode between a closed vessel and an arbitrary one processing module by opening a first and a second opening and closing parts. SOLUTION: In respective processing modules 3, a vacuum chamber is formed of a specimen processing chamber 8, a vacuum holding buffer chamber 7 containing a carrier arm 16 as well as a lock chamber 6b connecting to another lock chamber 6a of a vacuum moving device 2 while respective chambers are communicated with gate valves 5b, 5c. The lock chamber 6b is connected to an N2 gas source 14 for restoring the lock chambers 6a and 6b to atmospheric air through the intermediary of a valve 15. Besides, a vacuum pump 12 is connected to the lock chamber 6b through the intermediary of another valve 13 for vacuumizing. Furthermore, a load unload device 1 is provided with the same structure as that of the processing modules 3. Through these procedures, the problem of mutual pollution between respective vacuum chambers is settled while respective processing modules are separated, thereby enabling the maintainability of the processors to be enhanced. |
