发明名称
摘要 <p>The inlet section of the friction vacuum pump consists of a turbomolecular pumping stator (5) and rotor (8) with respective blades (14, 15). The succeeding stage has annular discs (16) fixed to the rotor and co-operating with other annular discs (17) on pref. one-piece stator rings (6). Helical projections (18) between grooves (19) on the latter discs are shaped so as to promote a continuous flow of gas from the inlet flange (12) mated with the vacuum vessel to the outlet (13). The shaft (10) is rotated by a motor (11).</p>
申请公布号 EP0874159(A3) 申请公布日期 1998.11.18
申请号 EP19980110191 申请日期 1994.03.31
申请人 LEYBOLD VAKUUM GMBH 发明人
分类号 F04D17/16;F04D19/04;(IPC1-7):F04D19/04 主分类号 F04D17/16
代理机构 代理人
主权项
地址