MANUFACTURE OF CERAMIC MULTILAYERED BOARD AND MANUFACTURING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic multilayered board and a manufacturing equipment wherein stretch and deformation of a green sheet laminated member at the time of contact bonding can be reduced and dimensional precision can be improved. SOLUTION: An outer trench 43 having an outer edge part and an inner edge part which are smaller than the outer peripheral part of a green sheet laminated member 2 and larger than the outer peripheral part 21 of a part turning to a product of the green sheet laminated member 2 is formed on the lower surface part 41 of an upper plane board 40. An inner trench 44 having an outer edge part and an inner edge part which are smaller than the inner edge part of an outer trench 43 and larger than the outer peripheral part 21 of the part turning to the product of the green sheet laminated member 2 is formed inside the outer trench 43 of the lower surface part 41. When the green sheet laminated member 2 is fixed by pressure, stretch and deformation of the green sheet laminated member can be reduced by making the surface of the green sheet laminated member 2 cut into the outer trench 43 and the inner trench 44 of the upper plane board 40, and dimensional precision can be improved.