| 摘要 |
PROBLEM TO BE SOLVED: To follow a track of a beam spot without deforming a swinging body for a driving torque supplied to the swinging body from an electrode even if an intrinsic vibration frequency of the swinging body is low. SOLUTION: This device is provided with a swinging body 1 including a reflecting mirror, and a plate part 5 supporting the swinging body 1 through an elastic body 2 and having electrode parts 6a, 6b opposing to the swinging body 1, the electrode parts 6a, 6b and the swinging body 1 are charged and rotates the swinging body 1 by electrostatic force. The swinging body 1 is formed with silicone, a direction <1, 1, 1> or <1, 1, 0> of this silicon is parallel with a plate surface 12, and made a direction intersecting orthogonally to a supporting shaft 15 of the swinging body 1 of the plate including the elastic body. |
